Vacuum system components

ABSTRACT

A vacuum port manifold having a plurality of ports each having a planar sealing surface comprises a unitary construction derived from an intermediate unitary structure having a compound curved surface at least in part. The planar sealing surfaces are formed by machining selected planes across the compound curved surface.

This is a divisional of copending application Ser. No. 08/400,357 filedon Mar. 8, 1995.

FIELD OF THE INVENTION

This invention relates to vacuum systems, and more particularly tohardware components for vacuum systems and methods of manufacturing suchcomponents. The invention has particular utility with respect toall-metal flanged manifolds for high vacuum (HV) and ultra-high vacuum(UHV) systems and will be described in connection with such utility,although other utilities are contemplated.

BACKGROUND OF THE INVENTION

All-metal manifolds are widely used in UHV vacuum systems tointerconnect system components such as emitters and detectors, vacuumlines, and the like. Referring to FIG. 1, a conventional all-metalmanifold, available from Kimball Physics, Inc., Wilton, N.H., comprisesa cylindrical main body section 120 having an annular base flange 122adjacent one end thereof. A flanged end port member 124 is mounted onbody 120 opposite flange 122, and a plurality of flanged side portmembers 126 (four are shown for illustration purposes) are mountedequi-spaced around the circumference of body 120 and angled downwardlyand inwardly so that imaginary lines running centrally of ports 124 and126 will converge at a single point (not shown). Each flange 124, 126includes a plurality of tapped bolt holes 128 for joining similarlysized and shaped flanges carried by other adapters, instruments and/orconduits, while base flange 122 includes a set of tapped holes 130 and aset of clear holes 132, e.g. for mounting the manifold to a chamber orthe like. In order to assure a gas-tight connection, the face of baseflange 122 and port members 124 and 126 each have an annular recess 134,each having an annular "knife edge" 135 for accommodating and engaging asoft metal gasket material, e.g. in accordance with teachings of U.S.Pat. No. 3,208,758.

Body 120 and port members 124 and 126 typically are formed separately ofstainless steel such as type 304 stainless, and are welded together toform a gas-tight construction. Base flange 122 also is formedseparately, and may be welded to body 120 in fixed position, or may berotatably retained on body 120 by means of a rotatable flange retainingring 123, which in turn is welded to body 120.

While prior art manifolds of the type described above have achievedwidespread use and are available commercially from several sources,fabrication is a somewhat difficult and costly process. First, the mainbody section 120, end port member 124 and side port members 126 areseparately machined from round metal stock, e.g. on a metal lathe. Holes136 (see FIG. 2) are then drilled in main body section 120. The flangedend walls of end port member 124 and side port members 126 are machinedflat, holes 128 are tapped therein, and annular recess 134 and knifeedge 135 are machined in the flanged end walls of port members 124 and126. The ends of port members 124 and 126 opposite the flanged end wallsof port members 124 and 126 are then machined to fit together with mainbody section 120, and the port members are carefully positioned andlined-up, e.g. using optical alignment means, and tacked in position bywelding. The port members are then finish welded and again checked foralignment. Finally, base flange 122, which also is separately formed, ismounted on rotatable flange ring 123 which in turn is welded to bodysection 120. As will be appreciated, machining the various parts isexpensive and time-consuming. Also, achieving exact alignment of portmembers 124 and 126 presents a problem. Moreover, end port member 124,which must be made long and thin-walled to provide sufficient clearancefor the side port members 126, is mechanically compromised.Consequently, end port member 124 may flex out of alignment should aheavy component or large external force be applied to the end port.

It is thus a general object of the present invention to provide improvedall which overcome the aforesaid and other disadvantages of the priorart.

Another object of the present invention is provide an improved all-metalmanifold which is easy to manufacture, and having improved performanceand reliability characteristics.

SUMMARY OF THE INVENTION

According to the present invention, these and other objects thatadvantages are achieved in an all-metal manifold in which the body, sideand end ports are all machined from a unitary block of metal.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the present invention, together withfurther objects, advantages and capabilities thereof, reference is madeto the accompanying drawings in which like numerals depict like parts,and in which:

FIG. 1 is a perspective view of a five-way manifold made in accordancewith the prior art;

FIG. 2 is an exploded view, similar to FIG. 1;

FIG. 3 is a top plan view of a five-way manifold made in accordance withone embodiment of the present invention;

FIG. 4 is a side elevation view of the manifold of FIG. 3, taken fromside A--A;

FIG. 5 is a side elevational view of the manifold of FIG. 3, taken fromside A'--A';

FIG. 6 is a cross-sectional view of the manifold of FIG. 3 taken alongsection B--B;

FIG. 7 is a cross-sectional view of the manifold of FIG. 3 taken alongsection C--C;

FIG. 8 is a bottom plan view of the manifold of FIG. 3;

FIG. 9 is a block flow diagram of the process for forming the main bodypart of the manifold of FIG. 3 according to a preferred embodiment ofthe present invention;

FIG. 10 is a side elevational view, in cross section, showing the mainbody part of the manifold of FIG. 3 at an intermediate step in themanufacturing process;

FIG. 11 is a top plan view of a two-way manifold made in accordance withanother embodiment of the present invention;

FIG. 12 is a cross-sectional view of the two-way manifold of FIG. 11taken along line A--A;

FIG. 13 is a cross-sectional view of the two-way manifold shown in FIG.11, taken along line B--B;

FIG. 14 is a side elevational view, in cross section, showing thetwo-way manifold of FIG. 11 at an intermediate step in the manufacturingprocess;

FIG. 15 is a top plan view of a three-way manifold made inaccordances-with the present invention;

FIG. 16 is a cross-sectional view of the three-way manifold of FIG. 15taken along line A--A;

FIG. 17 is a side elevational view of the three-way manifold of FIG. 15;

FIG. 18 is a cross-sectional view of the three-way manifold of FIG. 15at an intermediate step in the manufacturing process;

FIGS. 19-23 are top plan views of yet other manifolds, connectors andadapters made in accordance with the present invention;

FIG. 24 is a perspective view of an eight-way manifold made inaccordance with the present invention;

FIG 25 is a perspective view of a six-way prior art cube chamber;

FIG. 26 is a side elevational view of a six-way chamber made inaccordance with the present invention;

FIG. 27 is a side elevational view of ten-way chamber made in accordancewith the present invention;

FIG. 28 is a top plan view of a fourteen-way chamber made in accordancewith the present invention; and

FIG. 29 is a side elevational view of the fourteen-way chamber of FIG.28.

DETAILED DESCRIPTION OF THE INVENTION

Referring to FIGS. 3-8, a five-way manifold of the present inventioncomprises a unitary body member 140 and a rotatable flange assembly 142.Rotatable flange assembly 142 is of conventional construction, and has agenerally circular shape and is machined out of a metal such asstainless steel. Rotatable flange assembly 142 has a recess 144 intowhich is rotatably mounted a flange ring 146. The latter is welded tobody 140 at 145 so as to form a rotatable flange, in known manner. Theend face 147 of flange assembly 142 has an annular recess at 148 whichhas an annular knife edge 149 for accommodating and engaging a metalsealing gasket (not shown) in known manner.

A plurality of bolt holes 150 are formed through flange assembly 142 forbolting the assembly to a mating component or device (not shown). Holes150 may be threaded or smooth walled. In a preferred embodiment of theinvention, flange assembly 142 includes both threaded holes and smoothwalled holes.

Body 140 comprises an end port 152 and four angled side ports 154 spacedequi-distant from one another around the circumference of the body 140.End port 152 and side ports 154 are hollow and communicate with a hollow156 formed centrally of body 140. The end faces of port 152 and sideports 154, which form the sealing surfaces of the body ports 152 and154, each include an annular recess 158 having an annular knife edge 159for accommodating and engaging a metal sealing gasket (not shown) inknown manner. A plurality of blind threaded holes 160 are formed intothe end faces of end port 152 and side ports 154 for accommodating boltsfor mounting mating components or devices (not shown).

A feature and advantage of the present invention results from formingbody 140, including ports 152 and 154, as a unitary piece. Referringalso to FIGS. 9 and 10, starting with a short cylindrical blank ofstainless steel, the blank is turned on a lathe to produce a roughturned blank 162 having a spherical surface portion 168. Thereafterblank 162 is milled out at 164 and 166. Threaded holes 160, annularrecess 158 and knife edge 159 also may be formed at this time whereby toform the end port 152 sealing surface. Thereafter, the spherical surfaceportion 168 of blank 162 is machined flat across selected planes (shownin phantom at 169), e.g. using fly cutters to form the planar end wallsurfaces of side ports 154. For example, in order to form four sideports 154, e.g. as in the embodiment shown in FIGS. 3-8, cuts are madeacross four planes. Annular recesses 158 and knife edges 159 are thenmilled in the planar end wall surfaces of side ports 154 whereby to formthe side port 154 sealing surfaces, the ports are bored out at 170,blind threaded holes 160 formed therein, and the side walls 161 cut backin order to reduce weight and provide clearance for accessing bolt holes150.

The flange assembly 142 which is separately formed in known manner isthen welded to body 140 in known manner.

As can be seen from the foregoing, the present invention provides aprocess for making improved manifolds which overcomes the aforesaid andother disadvantages of the prior art. A particular feature and advantageof the present invention which results from machining body 140 from aunitary piece of metal is that milling tolerances can be extremelytightly controlled using numerically controlled milling machines. Thus,alignment of the side ports and end port is assured. Also, all but oneweld line is eliminated, and there is far more metal supporting the endport 152 than in conventional construction. As a result, vacuummanifolds made in accordance with the present invention are stronger,and the end port 152 is more resistant to movement. The invention alsoprovides simplicity and economy in the manufacturing process.

This invention is susceptible to modification. For example, referring toFIGS. 11-13, there is shown a two-way manifold indicated generally at180, made in accordance with the present invention. Two-way manifold 180comprises a unitary body including an integrally formed flanged base 182and two angled side ports 184, 186. Flanged base 182 includes a facialannular recess 188 having an annular knife edge 190 for accommodatingand engaging a soft metal gasket in known manner, and a plurality ofsmooth wall holes 192 and threaded holes 194.

The two angled side ports 184, 186 are hollow and communicate with acommon hollow 196 formed centrally of body 180. As before, ports 184 and186 each include planar sealing surfaces with a facial annular recess198 having an annular knife edge 200 for accommodating and engaging ametal sealing gasket. A plurality of blind threaded holes 202 are formedin the face of side ports 184, 186. Additional blind threaded holes 204are formed between ports 184, 186 for affixing accessories.

As before, two-way manifold 180 may be formed from a unitary piece ofmetal. Referring also to FIG. 15, starting with a short cylindricalblank of stainless steel, the blank is turned on a lathe to produce arough turned blank 206 having a spherical surface portion 208. Holes 192and 194, annular recess 188 and annular knife edge 190, and hollow 196may all then be formed.

Thereafter, the spherical surface portion 208 of blank 206 machined flatacross two planes shown in phantom at 209 in FIG. 16, e.g. using flycutters, to form the planar end wall sealing surfaces of side ports 184,186. Annular recesses 198 and annular knife edges 200 are then milled inthe planar end wall surfaces of ports 184, 186, the ports bored out at210, and blind threaded holes 202 formed in the planar end wall surfacesof ports 184, 186. Blind threaded holes 204 also may be formed at thistime. Finally, the sides of side ports 184, 186 are machined flat at 212and 214.

Referring to FIGS. 15-17, there is shown a three-way manifold 220 madein accordance with yet another embodiment of the present invention.Three-way manifold 220 is similar to two-way manifold 180 (FIGS. 11-13)and comprises a unitary construction including an integral flanged baseportion 222 having a recess 224 and an annular knife edge 246 foraccommodating and engaging a metal sealing gasket. Also, flange 222includes a plurality of smooth wall holes 228 and threaded holes 230.Three-way manifold 220 also includes three port planar sealing faces232, 234, 236, each of which includes an annular recess 238 and annularknife edge 240 for accommodating and engaging a metal sealing gasket.Planar port faces 232, 234, 236 are spaced apart 180° and are angled at45° from base flange 220. Port faces 234, 236 and 238 are bored throughat 242 and communicate with an inner chamber 246 which is bored throughflange 222.

Referring also to FIG. 18, three-way manifold 220 is formed as a unitarypiece starting with a short cylindrical blank of stainless steel. Theblank is turned on a lathe to produce a rough turned blank 248 having aspherical surface portion 250. Thereafter, spherical surface portion 250is machined flat across three planes (only one of which is shown inphantom at 252) using fly cutters to form the planar end wall sealingsurfaces of (flanges 232, 234, 236. Bores 242, annular recesses 238 andannular knife edges 240 are then machined in the planar end wallsurfaces, blind threaded holes 256 are bored in the planar end wallsurfaces and also at selected locations in the cylindrical surface 258remaining after the three planes are cut. Finally, bore 246, annularrecess 224 and annular knife edges 226 are machined through flange 222,and holes 228 and 230 are bored through flange 222.

Various changes may be made in the foregoing without departing from thespirit and scope of the invention. For example, while the base flange inthe five-way manifold shown in FIGS. 3-8 was formed separately as arotatable flange, the base flange could be made as a unitary part of themanifold, for example, as illustrated in the case of the two-way andthree-way manifolds of FIGS. 11-13 and 15-17. Similarly, the base flangeof the two-way and three-way manifolds of FIGS. 11-13 and 15-17,respectively, may be formed separately and made rotatable.

Yet other changes may be made without departing from the spirit andscope of the invention. For example, and with reference to FIGS. 19-24,following the manufacturing process of the present invention, it ispossible to form, e.g. three-way, four-way, five-way, six-way, seven-wayor even eight-way manifolds, connectors and adapters, all from a unitarypiece of metal. As can best be seen in FIGS. 19-23, for manifolds,connectors and adaptors having ports which bisect only two planes, theparts can be machined directly from cylindrical blanks by machining theplanar end wall sealing surfaces of the ports by cutting an appropriatenumber of planes directly across the cylindrical surface (shown inphantom at 260) of the blank. Alternatively, as shown in FIG. 24, theblank may first be formed with spherical surfaces so that when thesealing surfaces are formed by cutting across planes, rounded surfaces265 are left.

The manufacturing process of the present invention also may be usedadvantageously to form reaction chambers of unitary construction.Referring specifically to FIG. 25, six-way cube chambers have beenmachined from solid blocks of metal. However, such prior art six-waycube chambers have several disadvantages. For one, prior art six-waycube chambers have substantial excess material at their corners 270, andthus are heavy. Also, prior art six-way cube chambers have very limitedinterior space 272 and thus have limited capacity for tools, etc.Six-way cube chambers made in accordance with the present invention (seeFIG. 26) are lighter weight and, have substantially larger andunincumbered interior space 274. Also, six-way cube chambers made inaccordance with the present invention may be provided withblind-threaded holes 276 on their exterior spherical surfaces 278 forfixturing, heaters or other tools.

Referring to FIG. 27, it is also possible to fabricate, for example, aten-way chamber from a unitary block of metal using the process of thepresent invention, by forming a five-way manifold 280 integral with abase cube chamber 282.

Referring to FIGS. 28 and 29, it is also possible to form differentdiameter sealing surfaces 282, 284 by cutting across different planes.

As can be seen from the foregoing, the present invention providesseveral significant advantages. For one, chambers made in accordancewith the present invention have increased internal volume for a givensize. This translates to more working space, less mass and higherpumping speeds. Moreover, chambers made in accordance with the presentinvention can be designed with customized port angles and higher densityport packing than possible with conventional constructions. Whileseveral preferred embodiments of the invention have been disclosed indetail, it will be understood that other embodiments are possible. Forexample, it is also possible to form circular sealing surfaces bycutting across other compound curved surfaces such as ellipsoids or thelike.

Still other changes may be made without departing from the spirit andscope of the invention.

I claim:
 1. An all-metal vacuum port manifold comprising a unitary metalbody defining a hollow, and having a plurality of spaced ports eachhaving a planar sealing surface communicating with one another via saidhollow, the improvement wherein the body comprises a unitaryconstruction derived from an intermediate unitary structure having acompound curved surface at least in part, at least one of said planarsealing surfaces being formed by machining a selected plane across saidcompound curved surface and wherein each said port includes an annularrecess and an annular knife edge formed in its respective sealingsurface for engaging an all-metal gasket whereby to form a high vacuumgas-tight connection.
 2. A vacuum port manifold according to claim 1,and further comprising at least one rotatable flange mounted on saidunitary body, and communicating with said hollow.
 3. A vacuum portmanifold according to claim 1, and including a plurality of ports whoseplanar sealing surfaces are formed by machining across differentselected planes.
 4. A vacuum port manifold according to claim 1, whereinouter surface portions between said ports are curved at least in part.5. A vacuum port manifold according to claim 1, wherein said curvedsurfaces comprise spherical surfaces.
 6. A vacuum port manifoldaccording to claim 5, and further including at least one blind threadedhole in said curved surface.
 7. A vacuum port manifold according toclaim 1, wherein said curved surfaces comprise cylindrical surfaces, inpart.
 8. A vacuum port manifold according to claim 1, wherein saidcurved surfaces comprise ellipsoid surfaces.
 9. A vacuum port manifoldaccording to claim 1, and having three spaced planar sealing surfaces.10. A vacuum port manifold according to claim 1, and having four spacedplanar sealing surfaces.
 11. A vacuum port manifold according to claim1, and having five spaced planar sealing surfaces.
 12. A vacuum portmanifold according to claim 1, and having six spaced planar sealingsurfaces.
 13. A vacuum port manifold according to claim 1, and havingseven spaced planar sealing surfaces.
 14. A vacuum port manifoldaccording to claim 1, and having eight spaced planar sealing surfaces.15. A vacuum port manifold according to claim 1, and having nine spacedplanar sealing surfaces.
 16. A vacuum port manifold according to claim1, and having ten spaced planar sealing surfaces.
 17. A vacuum portmanifold according to claim 1, and having fourteen spaced planar sealingsurfaces.
 18. A vacuum port manifold according to claim 1, andcomprising at least two planar sealing surfaces of different diameters.